MTI Corporation - Plasma and Ozone Cleaners

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Desktop UV-Ozone Cleaner with 12" x 12" Chamber and Heating Stage up to 150C - EQ-PCE-22

It is an excellent tool to remove and strip photoresist, improve surface wettability, Clean SEM & TEM samples, UV polymer activation, assembly, etc.
UV-Ozone Cleaner has proven to be highly effective for non-acidic, dry, non-destructive atomic cleaning and removal of organic contaminants using intense 185 nm and 254 nm UV light. Under air and room temperature, the 185 line produces Ozone and while the 254 line excites organic molecules on the surface. This combination drives the rapid destruction and decimation of organic contaminants. 

Applications

• Clean silicon wafer, Gallium Arsenide wafer, quartz  and ITO glass
• Clean all types of oxide single crystal substrate such as sapphire, STO, and LAO.
• Clean gold and Pt surface
• An oxidizing surface of a light metallic material
• Activate Polymers and Crosslink Polymers
• UV Strip Photo Resist / Photoresist
• UV Clean Production Line LED displays

Environment Requirement

• Indoor Use Only; Altitude Use Up To 5,500 Feet;
• Temperature Range 41-104 Degrees Fahrenheit;
• Maximum Relative Humidity 80%, Up To 87 Degrees Fahrenheit Decreasing Linearly to 50% Relative Humidity At 104 Degrees Fahrenheit;
• Main Power Supply Fluctuations Not To Exceed 10% Of The Nominal Voltage; Overvoltage Category II;
• Pollution Degree 2; ozone level (ambient) measurement at <45 ppb.

Chamber & Sample Stage

• Stainless steel case
• Sliding drawer for easy sample loading
• Sample stage area is 310 mm x 320 mm ( ~12"x12" )
• Max. sample thickness: 40 mm
• An ozone venting device is built in the chamber
• The timer ranges from 0.01 seconds to 99.9 hours.

Heatable Sample Stage

• The sample stage is heatable up to 150ºC with the precision temperature controller
• The temperature controller is 20 segments programmable with +/-2 C accuracy
• Temperature uniformity:<10C within 6 inches diameter area; <20C within 12 inches diameter
• Heating rate: 15C/min max. 
• The distance between the sample stage and lamp is adjustable from 20mm to 40mm.

Dimension

510mm x 350mm x 400mm (W x H x D)

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To contact AVT Services about MTI Corporation Plasma and Ozone Cleaners use Get a quote.